WESEMiBAY 2026, Oct 14–16: Four Megasonic Cleaning Modules at Booth 1J05, Hall 1

HaKeDi · WESEMiBAY 2026 Invitation | 2026-09-21 | ~3 min readInvitation to the 2026 Shenzhen Bay Semiconductor Ecosystem Expo (WESEMiBAY)

Megasonic cleaning uses high-frequency mechanical waves in the ~1 MHz range to drive the liquid, removing sub-micron to nanometre particles with comparatively low surface damage. It is common in final chip cleaning and post-CMP steps.

The first selection question is how the acoustic field meets the workpiece. Immersed in a tank, travelling bonded to the surface, or sprayed across it — that choice decides whether the same parameter set holds stable on different platforms. The four module types are laid out side by side so you can match them to your process, not to a price list:

Nozzle-type megasonic module (HKD-JG series)

Multi-chemical nozzle type, nozzle type, and slurry-dispersion type; 1 MHz / 2 MHz, 40 W, carrier materials in quartz / PEEK / PTFE. Built for inline, localised jet cleaning on single-wafer cleaning platforms.

Tank-type megasonic module (HKD-TG series)

Multi-wafer and single-wafer tank types plus acid/alkali-resistant coated plates; 1–2 MHz, 1200–2400 W, 316L stainless steel. Built for immersion batch cleaning on wet benches.

Bonded-type megasonic module (HKD-PG series)

V-shaped and circular bonded heads; 1 MHz, 30–250 W, sapphire / stainless steel. Built for deep-hole cleaning in TSV process steps.

Water-curtain megasonic module (HKD-TG series)

Water-curtain and acid/alkali-resistant water-curtain types; 1 MHz, 1200–4800 W, PTFE / PVC. Built for large-format optical cleaning of glass substrates and OLED / LCD panels.

Booth 1J05 sits in Hall 1; walk in from the main aisle and follow the hall signage (the floor plan below marks the position). Hall 1 is at the Shenzhen Convention & Exhibition Center (Futian)[2]. Complete your visitor pre-registration online first and walk in with the confirmation, so you skip the on-site queue.

Visitor pre-registration for WESEMiBAY 2026 is open. Scan the code below to register and receive the hall floor plan and show materials; you can also follow the company account for booth and schedule reminders ahead of the show.